7/6/2010	8:58:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/6/2010	8:58:28 AM	Recipe started at 8:58 AM
7/6/2010	8:58:28 AM	H2 valve closed
7/6/2010	8:58:28 AM	BCl3 valve closed
7/6/2010	8:58:28 AM	PH3 valve closed
7/6/2010	8:58:28 AM	SiCl4 pre valve closed
7/6/2010	8:58:28 AM	SiCl4 post valve closed
7/6/2010	8:58:28 AM	Main Vac valve closed
7/6/2010	8:58:28 AM	Bypass valve closed
7/6/2010	8:58:28 AM	Bubbler valve closed
7/6/2010	8:58:28 AM	Helium valve opened
7/6/2010	8:58:28 AM	Helium MFC set to  500.000000
7/6/2010	8:58:28 AM	H2 MFC set to  0.000000
7/6/2010	8:58:28 AM	BCl3 MFC set to  0.000000
7/6/2010	8:58:28 AM	PHl3 MFC set to  0.000000
7/6/2010	8:58:28 AM	SiCl4 MFC set to  0.000000
7/6/2010	8:58:28 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	8:58:28 AM	Tube furnace set to 0
7/6/2010	8:59:48 AM	Helium valve closed
7/6/2010	8:59:48 AM	H2 valve closed
7/6/2010	8:59:48 AM	BCl3 valve closed
7/6/2010	8:59:48 AM	PH3 valve closed
7/6/2010	8:59:48 AM	SiCl4 pre valve closed
7/6/2010	8:59:48 AM	SiCl4 post valve closed
7/6/2010	8:59:48 AM	Main Vac valve closed
7/6/2010	8:59:48 AM	Bypass valve closed
7/6/2010	8:59:48 AM	Bubbler valve closed
7/6/2010	8:59:48 AM	Helium MFC set to  0.000000
7/6/2010	8:59:48 AM	H2 MFC set to  0.000000
7/6/2010	8:59:48 AM	BCl3 MFC set to  0.000000
7/6/2010	8:59:48 AM	PHl3 MFC set to  0.000000
7/6/2010	8:59:48 AM	SiCl4 MFC set to  0.000000
7/6/2010	8:59:48 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	8:59:48 AM	Tube furnace set to 0
7/6/2010	8:59:48 AM	Run finished at 8:59 AM
7/6/2010	8:59:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/6/2010	9:15:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2010	9:15:39 AM	Recipe started at 9:15 AM
7/6/2010	9:15:39 AM	Helium valve closed
7/6/2010	9:15:39 AM	H2 valve closed
7/6/2010	9:15:39 AM	BCl3 valve closed
7/6/2010	9:15:39 AM	PH3 valve closed
7/6/2010	9:15:39 AM	SiCl4 pre valve closed
7/6/2010	9:15:39 AM	SiCl4 post valve closed
7/6/2010	9:15:39 AM	Main Vac valve closed
7/6/2010	9:15:39 AM	Bubbler valve closed
7/6/2010	9:15:39 AM	Bypass valve opened
7/6/2010	9:15:39 AM	Helium MFC set to  0.000000
7/6/2010	9:15:39 AM	H2 MFC set to  0.000000
7/6/2010	9:15:39 AM	BCl3 MFC set to  0.000000
7/6/2010	9:15:39 AM	PHl3 MFC set to  0.000000
7/6/2010	9:15:39 AM	SiCl4 MFC set to  0.000000
7/6/2010	9:15:39 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	9:15:39 AM	Tube furnace set to 0
7/6/2010	9:16:27 AM	Helium valve closed
7/6/2010	9:16:27 AM	H2 valve closed
7/6/2010	9:16:27 AM	BCl3 valve closed
7/6/2010	9:16:27 AM	PH3 valve closed
7/6/2010	9:16:27 AM	SiCl4 pre valve closed
7/6/2010	9:16:27 AM	SiCl4 post valve closed
7/6/2010	9:16:27 AM	Bubbler valve closed
7/6/2010	9:16:27 AM	Main Vac valve opened
7/6/2010	9:16:27 AM	Bypass valve opened
7/6/2010	9:16:27 AM	Helium MFC set to  0.000000
7/6/2010	9:16:27 AM	H2 MFC set to  0.000000
7/6/2010	9:16:27 AM	BCl3 MFC set to  0.000000
7/6/2010	9:16:27 AM	PHl3 MFC set to  0.000000
7/6/2010	9:16:27 AM	SiCl4 MFC set to  0.000000
7/6/2010	9:16:27 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	9:16:27 AM	Tube furnace set to 0
7/6/2010	9:16:27 AM	Run finished at 9:16 AM
7/6/2010	9:16:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2010	9:21:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/6/2010	9:21:39 AM	Recipe started at 9:21 AM
7/6/2010	9:21:39 AM	H2 valve closed
7/6/2010	9:21:39 AM	BCl3 valve closed
7/6/2010	9:21:39 AM	PH3 valve closed
7/6/2010	9:21:39 AM	SiCl4 pre valve closed
7/6/2010	9:21:39 AM	SiCl4 post valve closed
7/6/2010	9:21:39 AM	Main Vac valve closed
7/6/2010	9:21:39 AM	Bypass valve closed
7/6/2010	9:21:39 AM	Bubbler valve closed
7/6/2010	9:21:39 AM	Helium valve opened
7/6/2010	9:21:39 AM	Helium MFC set to  500.000000
7/6/2010	9:21:39 AM	H2 MFC set to  0.000000
7/6/2010	9:21:39 AM	BCl3 MFC set to  0.000000
7/6/2010	9:21:39 AM	PHl3 MFC set to  0.000000
7/6/2010	9:21:39 AM	SiCl4 MFC set to  0.000000
7/6/2010	9:21:39 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	9:21:39 AM	Tube furnace set to 0
7/6/2010	9:23:01 AM	Helium valve closed
7/6/2010	9:23:01 AM	H2 valve closed
7/6/2010	9:23:01 AM	BCl3 valve closed
7/6/2010	9:23:01 AM	PH3 valve closed
7/6/2010	9:23:01 AM	SiCl4 pre valve closed
7/6/2010	9:23:01 AM	SiCl4 post valve closed
7/6/2010	9:23:01 AM	Main Vac valve closed
7/6/2010	9:23:01 AM	Bypass valve closed
7/6/2010	9:23:01 AM	Bubbler valve closed
7/6/2010	9:23:01 AM	Helium MFC set to  0.000000
7/6/2010	9:23:01 AM	H2 MFC set to  0.000000
7/6/2010	9:23:01 AM	BCl3 MFC set to  0.000000
7/6/2010	9:23:01 AM	PHl3 MFC set to  0.000000
7/6/2010	9:23:01 AM	SiCl4 MFC set to  0.000000
7/6/2010	9:23:01 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	9:23:02 AM	Tube furnace set to 0
7/6/2010	9:23:17 AM	Helium valve closed
7/6/2010	9:23:17 AM	H2 valve closed
7/6/2010	9:23:17 AM	BCl3 valve closed
7/6/2010	9:23:17 AM	PH3 valve closed
7/6/2010	9:23:17 AM	SiCl4 pre valve closed
7/6/2010	9:23:17 AM	SiCl4 post valve closed
7/6/2010	9:23:17 AM	Main Vac valve closed
7/6/2010	9:23:17 AM	Bubbler valve closed
7/6/2010	9:23:17 AM	Bypass valve opened
7/6/2010	9:23:17 AM	Helium MFC set to  0.000000
7/6/2010	9:23:17 AM	H2 MFC set to  0.000000
7/6/2010	9:23:17 AM	BCl3 MFC set to  0.000000
7/6/2010	9:23:17 AM	PHl3 MFC set to  0.000000
7/6/2010	9:23:17 AM	SiCl4 MFC set to  0.000000
7/6/2010	9:23:17 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	9:23:17 AM	Tube furnace set to 0
7/6/2010	9:23:51 AM	Helium valve closed
7/6/2010	9:23:51 AM	H2 valve closed
7/6/2010	9:23:51 AM	BCl3 valve closed
7/6/2010	9:23:51 AM	PH3 valve closed
7/6/2010	9:23:51 AM	SiCl4 pre valve closed
7/6/2010	9:23:51 AM	SiCl4 post valve closed
7/6/2010	9:23:51 AM	Bubbler valve closed
7/6/2010	9:23:51 AM	Main Vac valve opened
7/6/2010	9:23:51 AM	Bypass valve opened
7/6/2010	9:23:51 AM	Helium MFC set to  0.000000
7/6/2010	9:23:51 AM	H2 MFC set to  0.000000
7/6/2010	9:23:51 AM	BCl3 MFC set to  0.000000
7/6/2010	9:23:51 AM	PHl3 MFC set to  0.000000
7/6/2010	9:23:51 AM	SiCl4 MFC set to  0.000000
7/6/2010	9:23:51 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	9:23:51 AM	Tube furnace set to 0
7/6/2010	9:28:51 AM	H2 valve closed
7/6/2010	9:28:51 AM	BCl3 valve closed
7/6/2010	9:28:51 AM	PH3 valve closed
7/6/2010	9:28:51 AM	SiCl4 pre valve closed
7/6/2010	9:28:51 AM	SiCl4 post valve closed
7/6/2010	9:28:51 AM	Main Vac valve closed
7/6/2010	9:28:51 AM	Bypass valve closed
7/6/2010	9:28:51 AM	Bubbler valve closed
7/6/2010	9:28:51 AM	Helium valve opened
7/6/2010	9:28:51 AM	Helium MFC set to  500.000000
7/6/2010	9:28:51 AM	H2 MFC set to  0.000000
7/6/2010	9:28:51 AM	BCl3 MFC set to  0.000000
7/6/2010	9:28:51 AM	PHl3 MFC set to  0.000000
7/6/2010	9:28:51 AM	SiCl4 MFC set to  0.000000
7/6/2010	9:28:51 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	9:28:51 AM	Tube furnace set to 0
7/6/2010	9:30:13 AM	Helium valve closed
7/6/2010	9:30:13 AM	H2 valve closed
7/6/2010	9:30:13 AM	BCl3 valve closed
7/6/2010	9:30:13 AM	PH3 valve closed
7/6/2010	9:30:13 AM	SiCl4 pre valve closed
7/6/2010	9:30:13 AM	SiCl4 post valve closed
7/6/2010	9:30:13 AM	Main Vac valve closed
7/6/2010	9:30:13 AM	Bypass valve closed
7/6/2010	9:30:13 AM	Bubbler valve closed
7/6/2010	9:30:13 AM	Helium MFC set to  0.000000
7/6/2010	9:30:13 AM	H2 MFC set to  0.000000
7/6/2010	9:30:13 AM	BCl3 MFC set to  0.000000
7/6/2010	9:30:13 AM	PHl3 MFC set to  0.000000
7/6/2010	9:30:13 AM	SiCl4 MFC set to  0.000000
7/6/2010	9:30:13 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	9:30:14 AM	Tube furnace set to 0
7/6/2010	9:30:29 AM	Helium valve closed
7/6/2010	9:30:29 AM	H2 valve closed
7/6/2010	9:30:29 AM	BCl3 valve closed
7/6/2010	9:30:29 AM	PH3 valve closed
7/6/2010	9:30:29 AM	SiCl4 pre valve closed
7/6/2010	9:30:29 AM	SiCl4 post valve closed
7/6/2010	9:30:29 AM	Main Vac valve closed
7/6/2010	9:30:29 AM	Bubbler valve closed
7/6/2010	9:30:29 AM	Bypass valve opened
7/6/2010	9:30:29 AM	Helium MFC set to  0.000000
7/6/2010	9:30:29 AM	H2 MFC set to  0.000000
7/6/2010	9:30:29 AM	BCl3 MFC set to  0.000000
7/6/2010	9:30:29 AM	PHl3 MFC set to  0.000000
7/6/2010	9:30:29 AM	SiCl4 MFC set to  0.000000
7/6/2010	9:30:29 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	9:30:29 AM	Tube furnace set to 0
7/6/2010	9:31:03 AM	Helium valve closed
7/6/2010	9:31:03 AM	H2 valve closed
7/6/2010	9:31:03 AM	BCl3 valve closed
7/6/2010	9:31:03 AM	PH3 valve closed
7/6/2010	9:31:03 AM	SiCl4 pre valve closed
7/6/2010	9:31:03 AM	SiCl4 post valve closed
7/6/2010	9:31:03 AM	Bubbler valve closed
7/6/2010	9:31:03 AM	Main Vac valve opened
7/6/2010	9:31:03 AM	Bypass valve opened
7/6/2010	9:31:03 AM	Helium MFC set to  0.000000
7/6/2010	9:31:03 AM	H2 MFC set to  0.000000
7/6/2010	9:31:03 AM	BCl3 MFC set to  0.000000
7/6/2010	9:31:03 AM	PHl3 MFC set to  0.000000
7/6/2010	9:31:03 AM	SiCl4 MFC set to  0.000000
7/6/2010	9:31:03 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	9:31:03 AM	Tube furnace set to 0
7/6/2010	9:36:03 AM	H2 valve closed
7/6/2010	9:36:03 AM	BCl3 valve closed
7/6/2010	9:36:03 AM	PH3 valve closed
7/6/2010	9:36:03 AM	SiCl4 pre valve closed
7/6/2010	9:36:03 AM	SiCl4 post valve closed
7/6/2010	9:36:03 AM	Main Vac valve closed
7/6/2010	9:36:03 AM	Bypass valve closed
7/6/2010	9:36:03 AM	Bubbler valve closed
7/6/2010	9:36:03 AM	Helium valve opened
7/6/2010	9:36:03 AM	Helium MFC set to  500.000000
7/6/2010	9:36:03 AM	H2 MFC set to  0.000000
7/6/2010	9:36:03 AM	BCl3 MFC set to  0.000000
7/6/2010	9:36:03 AM	PHl3 MFC set to  0.000000
7/6/2010	9:36:03 AM	SiCl4 MFC set to  0.000000
7/6/2010	9:36:03 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	9:36:03 AM	Tube furnace set to 0
7/6/2010	9:37:26 AM	Helium valve closed
7/6/2010	9:37:26 AM	H2 valve closed
7/6/2010	9:37:26 AM	BCl3 valve closed
7/6/2010	9:37:26 AM	PH3 valve closed
7/6/2010	9:37:26 AM	SiCl4 pre valve closed
7/6/2010	9:37:26 AM	SiCl4 post valve closed
7/6/2010	9:37:26 AM	Main Vac valve closed
7/6/2010	9:37:26 AM	Bypass valve closed
7/6/2010	9:37:26 AM	Bubbler valve closed
7/6/2010	9:37:26 AM	Helium MFC set to  0.000000
7/6/2010	9:37:26 AM	H2 MFC set to  0.000000
7/6/2010	9:37:26 AM	BCl3 MFC set to  0.000000
7/6/2010	9:37:26 AM	PHl3 MFC set to  0.000000
7/6/2010	9:37:26 AM	SiCl4 MFC set to  0.000000
7/6/2010	9:37:26 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	9:37:26 AM	Tube furnace set to 0
7/6/2010	9:37:41 AM	Helium valve closed
7/6/2010	9:37:41 AM	H2 valve closed
7/6/2010	9:37:41 AM	BCl3 valve closed
7/6/2010	9:37:41 AM	PH3 valve closed
7/6/2010	9:37:41 AM	SiCl4 pre valve closed
7/6/2010	9:37:41 AM	SiCl4 post valve closed
7/6/2010	9:37:41 AM	Main Vac valve closed
7/6/2010	9:37:41 AM	Bubbler valve closed
7/6/2010	9:37:41 AM	Bypass valve opened
7/6/2010	9:37:41 AM	Helium MFC set to  0.000000
7/6/2010	9:37:41 AM	H2 MFC set to  0.000000
7/6/2010	9:37:41 AM	BCl3 MFC set to  0.000000
7/6/2010	9:37:41 AM	PHl3 MFC set to  0.000000
7/6/2010	9:37:41 AM	SiCl4 MFC set to  0.000000
7/6/2010	9:37:41 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	9:37:41 AM	Tube furnace set to 0
7/6/2010	9:38:15 AM	Helium valve closed
7/6/2010	9:38:15 AM	H2 valve closed
7/6/2010	9:38:15 AM	BCl3 valve closed
7/6/2010	9:38:15 AM	PH3 valve closed
7/6/2010	9:38:15 AM	SiCl4 pre valve closed
7/6/2010	9:38:15 AM	SiCl4 post valve closed
7/6/2010	9:38:15 AM	Bubbler valve closed
7/6/2010	9:38:15 AM	Main Vac valve opened
7/6/2010	9:38:15 AM	Bypass valve opened
7/6/2010	9:38:15 AM	Helium MFC set to  0.000000
7/6/2010	9:38:15 AM	H2 MFC set to  0.000000
7/6/2010	9:38:15 AM	BCl3 MFC set to  0.000000
7/6/2010	9:38:15 AM	PHl3 MFC set to  0.000000
7/6/2010	9:38:15 AM	SiCl4 MFC set to  0.000000
7/6/2010	9:38:15 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	9:38:15 AM	Tube furnace set to 0
7/6/2010	9:43:15 AM	Helium valve closed
7/6/2010	9:43:15 AM	H2 valve closed
7/6/2010	9:43:15 AM	BCl3 valve closed
7/6/2010	9:43:15 AM	PH3 valve closed
7/6/2010	9:43:15 AM	SiCl4 pre valve closed
7/6/2010	9:43:15 AM	SiCl4 post valve closed
7/6/2010	9:43:15 AM	Bubbler valve closed
7/6/2010	9:43:15 AM	Main Vac valve opened
7/6/2010	9:43:15 AM	Bypass valve opened
7/6/2010	9:43:15 AM	Helium MFC set to  0.000000
7/6/2010	9:43:15 AM	H2 MFC set to  0.000000
7/6/2010	9:43:15 AM	BCl3 MFC set to  0.000000
7/6/2010	9:43:15 AM	PHl3 MFC set to  0.000000
7/6/2010	9:43:15 AM	SiCl4 MFC set to  0.000000
7/6/2010	9:43:15 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	9:43:16 AM	Tube furnace set to 0
7/6/2010	9:43:17 AM	Run finished at 9:43 AM
7/6/2010	9:43:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/6/2010	10:03:27 AM	Tube furnace set to 100
7/6/2010	10:03:29 AM	Helium valve opened
7/6/2010	10:03:31 AM	Helium MFC set to  100.000000
7/6/2010	10:11:22 AM	Helium valve closed
7/6/2010	10:11:24 AM	Helium MFC set to  0.000000
7/6/2010	10:13:09 AM	Tube furnace set to 0
7/6/2010	10:13:14 AM	Bypass valve closed
7/6/2010	10:13:15 AM	Main Vac valve closed
7/6/2010	10:13:26 AM	Main Vac valve opened
7/6/2010	10:13:27 AM	Bypass valve opened
7/6/2010	10:13:44 AM	Recipe started at 10:13 AM
7/6/2010	10:13:44 AM	Helium valve closed
7/6/2010	10:13:44 AM	BCl3 valve closed
7/6/2010	10:13:44 AM	PH3 valve closed
7/6/2010	10:13:44 AM	SiCl4 pre valve closed
7/6/2010	10:13:44 AM	SiCl4 post valve closed
7/6/2010	10:13:44 AM	Main Vac valve closed
7/6/2010	10:13:44 AM	Bypass valve closed
7/6/2010	10:13:44 AM	Bubbler valve closed
7/6/2010	10:13:44 AM	H2 valve opened
7/6/2010	10:13:44 AM	Helium MFC set to  0.000000
7/6/2010	10:13:44 AM	H2 MFC set to  500.000000
7/6/2010	10:13:45 AM	BCl3 MFC set to  0.000000
7/6/2010	10:13:45 AM	PHl3 MFC set to  0.000000
7/6/2010	10:13:45 AM	SiCl4 MFC set to  0.000000
7/6/2010	10:13:45 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	10:13:45 AM	Tube furnace set to 0
7/6/2010	10:15:04 AM	Helium valve closed
7/6/2010	10:15:04 AM	BCl3 valve closed
7/6/2010	10:15:04 AM	PH3 valve closed
7/6/2010	10:15:04 AM	SiCl4 pre valve closed
7/6/2010	10:15:04 AM	SiCl4 post valve closed
7/6/2010	10:15:04 AM	Main Vac valve closed
7/6/2010	10:15:04 AM	Bypass valve closed
7/6/2010	10:15:04 AM	H2 valve opened
7/6/2010	10:15:04 AM	Bubbler valve opened
7/6/2010	10:15:04 AM	Helium MFC set to  0.000000
7/6/2010	10:15:04 AM	H2 MFC set to  500.000000
7/6/2010	10:15:04 AM	BCl3 MFC set to  0.000000
7/6/2010	10:15:04 AM	PHl3 MFC set to  0.000000
7/6/2010	10:15:04 AM	SiCl4 MFC set to  0.000000
7/6/2010	10:15:04 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	10:15:04 AM	Tube furnace set to 1000
7/6/2010	10:35:04 AM	Helium valve closed
7/6/2010	10:35:04 AM	PH3 valve closed
7/6/2010	10:35:04 AM	Main Vac valve closed
7/6/2010	10:35:04 AM	Bypass valve closed
7/6/2010	10:35:04 AM	H2 valve opened
7/6/2010	10:35:04 AM	BCl3 valve opened
7/6/2010	10:35:04 AM	SiCl4 pre valve opened
7/6/2010	10:35:04 AM	SiCl4 post valve opened
7/6/2010	10:35:04 AM	Bubbler valve opened
7/6/2010	10:35:04 AM	Helium MFC set to  0.000000
7/6/2010	10:35:04 AM	H2 MFC set to  500.000000
7/6/2010	10:35:04 AM	BCl3 MFC set to  15.000000
7/6/2010	10:35:04 AM	PHl3 MFC set to  0.000000
7/6/2010	10:35:04 AM	SiCl4 MFC set to  50.000000
7/6/2010	10:35:04 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	10:35:05 AM	Tube furnace set to 1000
7/6/2010	10:47:04 AM	H2 valve closed
7/6/2010	10:47:04 AM	BCl3 valve closed
7/6/2010	10:47:04 AM	PH3 valve closed
7/6/2010	10:47:04 AM	SiCl4 pre valve closed
7/6/2010	10:47:04 AM	SiCl4 post valve closed
7/6/2010	10:47:04 AM	Main Vac valve closed
7/6/2010	10:47:05 AM	Bypass valve closed
7/6/2010	10:47:05 AM	Helium valve opened
7/6/2010	10:47:05 AM	Bubbler valve opened
7/6/2010	10:47:05 AM	Helium MFC set to  500.000000
7/6/2010	10:47:05 AM	H2 MFC set to  0.000000
7/6/2010	10:47:05 AM	BCl3 MFC set to  0.000000
7/6/2010	10:47:05 AM	PHl3 MFC set to  0.000000
7/6/2010	10:47:05 AM	SiCl4 MFC set to  0.000000
7/6/2010	10:47:05 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	10:47:05 AM	Tube furnace set to 0
7/6/2010	11:07:05 AM	Helium valve closed
7/6/2010	11:07:05 AM	H2 valve closed
7/6/2010	11:07:05 AM	BCl3 valve closed
7/6/2010	11:07:05 AM	PH3 valve closed
7/6/2010	11:07:05 AM	SiCl4 pre valve closed
7/6/2010	11:07:05 AM	SiCl4 post valve closed
7/6/2010	11:07:05 AM	Main Vac valve closed
7/6/2010	11:07:05 AM	Bypass valve closed
7/6/2010	11:07:05 AM	Bubbler valve closed
7/6/2010	11:07:05 AM	Helium MFC set to  0.000000
7/6/2010	11:07:05 AM	H2 MFC set to  0.000000
7/6/2010	11:07:05 AM	BCl3 MFC set to  0.000000
7/6/2010	11:07:05 AM	PHl3 MFC set to  0.000000
7/6/2010	11:07:05 AM	SiCl4 MFC set to  0.000000
7/6/2010	11:07:05 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	11:07:05 AM	Tube furnace set to 0
7/6/2010	11:07:05 AM	Run finished at 11:07 AM
7/6/2010	11:13:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2010	11:13:00 AM	Recipe started at 11:13 AM
7/6/2010	11:13:00 AM	Helium valve closed
7/6/2010	11:13:00 AM	H2 valve closed
7/6/2010	11:13:00 AM	BCl3 valve closed
7/6/2010	11:13:00 AM	PH3 valve closed
7/6/2010	11:13:00 AM	SiCl4 pre valve closed
7/6/2010	11:13:00 AM	SiCl4 post valve closed
7/6/2010	11:13:00 AM	Main Vac valve closed
7/6/2010	11:13:00 AM	Bubbler valve closed
7/6/2010	11:13:00 AM	Bypass valve opened
7/6/2010	11:13:00 AM	Helium MFC set to  0.000000
7/6/2010	11:13:00 AM	H2 MFC set to  0.000000
7/6/2010	11:13:00 AM	BCl3 MFC set to  0.000000
7/6/2010	11:13:00 AM	PHl3 MFC set to  0.000000
7/6/2010	11:13:00 AM	SiCl4 MFC set to  0.000000
7/6/2010	11:13:00 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	11:13:00 AM	Tube furnace set to 0
7/6/2010	11:13:47 AM	Helium valve closed
7/6/2010	11:13:47 AM	H2 valve closed
7/6/2010	11:13:47 AM	BCl3 valve closed
7/6/2010	11:13:47 AM	PH3 valve closed
7/6/2010	11:13:47 AM	SiCl4 pre valve closed
7/6/2010	11:13:47 AM	SiCl4 post valve closed
7/6/2010	11:13:47 AM	Bubbler valve closed
7/6/2010	11:13:47 AM	Main Vac valve opened
7/6/2010	11:13:47 AM	Bypass valve opened
7/6/2010	11:13:47 AM	Helium MFC set to  0.000000
7/6/2010	11:13:47 AM	H2 MFC set to  0.000000
7/6/2010	11:13:47 AM	BCl3 MFC set to  0.000000
7/6/2010	11:13:47 AM	PHl3 MFC set to  0.000000
7/6/2010	11:13:47 AM	SiCl4 MFC set to  0.000000
7/6/2010	11:13:47 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	11:13:47 AM	Tube furnace set to 0
7/6/2010	11:13:47 AM	Run finished at 11:13 AM
7/6/2010	11:13:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2010	11:16:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/6/2010	11:16:06 AM	Recipe started at 11:16 AM
7/6/2010	11:16:06 AM	H2 valve closed
7/6/2010	11:16:06 AM	BCl3 valve closed
7/6/2010	11:16:06 AM	PH3 valve closed
7/6/2010	11:16:06 AM	SiCl4 pre valve closed
7/6/2010	11:16:06 AM	SiCl4 post valve closed
7/6/2010	11:16:06 AM	Main Vac valve closed
7/6/2010	11:16:06 AM	Bypass valve closed
7/6/2010	11:16:06 AM	Bubbler valve closed
7/6/2010	11:16:06 AM	Helium valve opened
7/6/2010	11:16:06 AM	Helium MFC set to  500.000000
7/6/2010	11:16:06 AM	H2 MFC set to  0.000000
7/6/2010	11:16:06 AM	BCl3 MFC set to  0.000000
7/6/2010	11:16:06 AM	PHl3 MFC set to  0.000000
7/6/2010	11:16:06 AM	SiCl4 MFC set to  0.000000
7/6/2010	11:16:06 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	11:16:06 AM	Tube furnace set to 0
7/6/2010	11:17:22 AM	Helium valve closed
7/6/2010	11:17:22 AM	H2 valve closed
7/6/2010	11:17:22 AM	BCl3 valve closed
7/6/2010	11:17:22 AM	PH3 valve closed
7/6/2010	11:17:22 AM	SiCl4 pre valve closed
7/6/2010	11:17:22 AM	SiCl4 post valve closed
7/6/2010	11:17:22 AM	Main Vac valve closed
7/6/2010	11:17:22 AM	Bypass valve closed
7/6/2010	11:17:22 AM	Bubbler valve closed
7/6/2010	11:17:22 AM	Helium MFC set to  0.000000
7/6/2010	11:17:22 AM	H2 MFC set to  0.000000
7/6/2010	11:17:22 AM	BCl3 MFC set to  0.000000
7/6/2010	11:17:22 AM	PHl3 MFC set to  0.000000
7/6/2010	11:17:22 AM	SiCl4 MFC set to  0.000000
7/6/2010	11:17:22 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	11:17:22 AM	Tube furnace set to 0
7/6/2010	11:17:22 AM	Run finished at 11:17 AM
7/6/2010	11:17:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/6/2010	11:19:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2010	11:19:39 AM	Recipe started at 11:19 AM
7/6/2010	11:19:39 AM	Helium valve closed
7/6/2010	11:19:39 AM	H2 valve closed
7/6/2010	11:19:39 AM	BCl3 valve closed
7/6/2010	11:19:39 AM	PH3 valve closed
7/6/2010	11:19:39 AM	SiCl4 pre valve closed
7/6/2010	11:19:39 AM	SiCl4 post valve closed
7/6/2010	11:19:39 AM	Main Vac valve closed
7/6/2010	11:19:39 AM	Bubbler valve closed
7/6/2010	11:19:39 AM	Bypass valve opened
7/6/2010	11:19:39 AM	Helium MFC set to  0.000000
7/6/2010	11:19:39 AM	H2 MFC set to  0.000000
7/6/2010	11:19:39 AM	BCl3 MFC set to  0.000000
7/6/2010	11:19:39 AM	PHl3 MFC set to  0.000000
7/6/2010	11:19:39 AM	SiCl4 MFC set to  0.000000
7/6/2010	11:19:39 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	11:19:39 AM	Tube furnace set to 0
7/6/2010	11:20:25 AM	Helium valve closed
7/6/2010	11:20:25 AM	H2 valve closed
7/6/2010	11:20:25 AM	BCl3 valve closed
7/6/2010	11:20:25 AM	PH3 valve closed
7/6/2010	11:20:25 AM	SiCl4 pre valve closed
7/6/2010	11:20:25 AM	SiCl4 post valve closed
7/6/2010	11:20:25 AM	Bubbler valve closed
7/6/2010	11:20:25 AM	Main Vac valve opened
7/6/2010	11:20:25 AM	Bypass valve opened
7/6/2010	11:20:25 AM	Helium MFC set to  0.000000
7/6/2010	11:20:25 AM	H2 MFC set to  0.000000
7/6/2010	11:20:25 AM	BCl3 MFC set to  0.000000
7/6/2010	11:20:25 AM	PHl3 MFC set to  0.000000
7/6/2010	11:20:25 AM	SiCl4 MFC set to  0.000000
7/6/2010	11:20:25 AM	Bypass solenoid MFC set to  0.000000
7/6/2010	11:20:25 AM	Tube furnace set to 0
7/6/2010	11:20:25 AM	Run finished at 11:20 AM
7/6/2010	11:20:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2010	11:41:15 AM	Helium valve opened
7/6/2010	11:41:18 AM	Helium MFC set to  100.000000
7/6/2010	11:54:21 AM	Helium valve closed
7/6/2010	11:54:24 AM	Helium MFC set to  0.000000
7/6/2010	11:55:19 AM	Bypass valve closed
7/6/2010	11:55:20 AM	Main Vac valve closed
7/6/2010	11:55:26 AM	Main Vac valve opened
7/6/2010	11:55:26 AM	Bypass valve opened
7/6/2010	12:10:00 PM	Helium valve opened
7/6/2010	12:10:02 PM	Helium MFC set to  100.000000
7/6/2010	12:11:34 PM	Helium valve closed
7/6/2010	12:12:45 PM	Helium MFC set to  0.000000
7/6/2010	12:16:11 PM	Recipe started at 12:16 PM
7/6/2010	12:16:11 PM	Helium valve closed
7/6/2010	12:16:11 PM	BCl3 valve closed
7/6/2010	12:16:11 PM	PH3 valve closed
7/6/2010	12:16:11 PM	SiCl4 pre valve closed
7/6/2010	12:16:11 PM	SiCl4 post valve closed
7/6/2010	12:16:11 PM	Main Vac valve closed
7/6/2010	12:16:11 PM	Bypass valve closed
7/6/2010	12:16:11 PM	Bubbler valve closed
7/6/2010	12:16:11 PM	H2 valve opened
7/6/2010	12:16:11 PM	Helium MFC set to  0.000000
7/6/2010	12:16:11 PM	H2 MFC set to  500.000000
7/6/2010	12:16:11 PM	BCl3 MFC set to  0.000000
7/6/2010	12:16:11 PM	PHl3 MFC set to  0.000000
7/6/2010	12:16:11 PM	SiCl4 MFC set to  0.000000
7/6/2010	12:16:11 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	12:16:11 PM	Tube furnace set to 0
7/6/2010	12:17:30 PM	Helium valve closed
7/6/2010	12:17:30 PM	BCl3 valve closed
7/6/2010	12:17:30 PM	PH3 valve closed
7/6/2010	12:17:30 PM	SiCl4 pre valve closed
7/6/2010	12:17:30 PM	SiCl4 post valve closed
7/6/2010	12:17:30 PM	Main Vac valve closed
7/6/2010	12:17:30 PM	Bypass valve closed
7/6/2010	12:17:30 PM	H2 valve opened
7/6/2010	12:17:30 PM	Bubbler valve opened
7/6/2010	12:17:30 PM	Helium MFC set to  0.000000
7/6/2010	12:17:30 PM	H2 MFC set to  500.000000
7/6/2010	12:17:30 PM	BCl3 MFC set to  0.000000
7/6/2010	12:17:30 PM	PHl3 MFC set to  0.000000
7/6/2010	12:17:30 PM	SiCl4 MFC set to  0.000000
7/6/2010	12:17:30 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	12:17:30 PM	Tube furnace set to 1000
7/6/2010	12:37:30 PM	Helium valve closed
7/6/2010	12:37:30 PM	PH3 valve closed
7/6/2010	12:37:30 PM	Main Vac valve closed
7/6/2010	12:37:30 PM	Bypass valve closed
7/6/2010	12:37:30 PM	H2 valve opened
7/6/2010	12:37:30 PM	BCl3 valve opened
7/6/2010	12:37:30 PM	SiCl4 pre valve opened
7/6/2010	12:37:30 PM	SiCl4 post valve opened
7/6/2010	12:37:30 PM	Bubbler valve opened
7/6/2010	12:37:30 PM	Helium MFC set to  0.000000
7/6/2010	12:37:30 PM	H2 MFC set to  500.000000
7/6/2010	12:37:30 PM	BCl3 MFC set to  15.000000
7/6/2010	12:37:30 PM	PHl3 MFC set to  0.000000
7/6/2010	12:37:30 PM	SiCl4 MFC set to  50.000000
7/6/2010	12:37:30 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	12:37:30 PM	Tube furnace set to 1000
7/6/2010	12:47:30 PM	H2 valve closed
7/6/2010	12:47:30 PM	BCl3 valve closed
7/6/2010	12:47:30 PM	PH3 valve closed
7/6/2010	12:47:30 PM	SiCl4 pre valve closed
7/6/2010	12:47:30 PM	SiCl4 post valve closed
7/6/2010	12:47:30 PM	Main Vac valve closed
7/6/2010	12:47:30 PM	Bypass valve closed
7/6/2010	12:47:30 PM	Helium valve opened
7/6/2010	12:47:30 PM	Bubbler valve opened
7/6/2010	12:47:30 PM	Helium MFC set to  500.000000
7/6/2010	12:47:30 PM	H2 MFC set to  0.000000
7/6/2010	12:47:30 PM	BCl3 MFC set to  0.000000
7/6/2010	12:47:30 PM	PHl3 MFC set to  0.000000
7/6/2010	12:47:30 PM	SiCl4 MFC set to  0.000000
7/6/2010	12:47:30 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	12:47:30 PM	Tube furnace set to 0
7/6/2010	1:07:30 PM	Helium valve closed
7/6/2010	1:07:30 PM	H2 valve closed
7/6/2010	1:07:30 PM	BCl3 valve closed
7/6/2010	1:07:30 PM	PH3 valve closed
7/6/2010	1:07:30 PM	SiCl4 pre valve closed
7/6/2010	1:07:30 PM	SiCl4 post valve closed
7/6/2010	1:07:30 PM	Main Vac valve closed
7/6/2010	1:07:30 PM	Bypass valve closed
7/6/2010	1:07:30 PM	Bubbler valve closed
7/6/2010	1:07:30 PM	Helium MFC set to  0.000000
7/6/2010	1:07:30 PM	H2 MFC set to  0.000000
7/6/2010	1:07:30 PM	BCl3 MFC set to  0.000000
7/6/2010	1:07:30 PM	PHl3 MFC set to  0.000000
7/6/2010	1:07:30 PM	SiCl4 MFC set to  0.000000
7/6/2010	1:07:30 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	1:07:30 PM	Tube furnace set to 0
7/6/2010	1:07:31 PM	Run finished at 1:07 PM
7/6/2010	1:29:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2010	1:29:30 PM	Recipe started at 1:29 PM
7/6/2010	1:29:30 PM	Helium valve closed
7/6/2010	1:29:30 PM	H2 valve closed
7/6/2010	1:29:30 PM	BCl3 valve closed
7/6/2010	1:29:30 PM	PH3 valve closed
7/6/2010	1:29:30 PM	SiCl4 pre valve closed
7/6/2010	1:29:30 PM	SiCl4 post valve closed
7/6/2010	1:29:30 PM	Main Vac valve closed
7/6/2010	1:29:30 PM	Bubbler valve closed
7/6/2010	1:29:30 PM	Bypass valve opened
7/6/2010	1:29:30 PM	Helium MFC set to  0.000000
7/6/2010	1:29:30 PM	H2 MFC set to  0.000000
7/6/2010	1:29:30 PM	BCl3 MFC set to  0.000000
7/6/2010	1:29:30 PM	PHl3 MFC set to  0.000000
7/6/2010	1:29:30 PM	SiCl4 MFC set to  0.000000
7/6/2010	1:29:30 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	1:29:30 PM	Tube furnace set to 0
7/6/2010	1:30:18 PM	Helium valve closed
7/6/2010	1:30:18 PM	H2 valve closed
7/6/2010	1:30:18 PM	BCl3 valve closed
7/6/2010	1:30:18 PM	PH3 valve closed
7/6/2010	1:30:18 PM	SiCl4 pre valve closed
7/6/2010	1:30:18 PM	SiCl4 post valve closed
7/6/2010	1:30:18 PM	Bubbler valve closed
7/6/2010	1:30:18 PM	Main Vac valve opened
7/6/2010	1:30:18 PM	Bypass valve opened
7/6/2010	1:30:18 PM	Helium MFC set to  0.000000
7/6/2010	1:30:18 PM	H2 MFC set to  0.000000
7/6/2010	1:30:18 PM	BCl3 MFC set to  0.000000
7/6/2010	1:30:18 PM	PHl3 MFC set to  0.000000
7/6/2010	1:30:18 PM	SiCl4 MFC set to  0.000000
7/6/2010	1:30:18 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	1:30:18 PM	Tube furnace set to 0
7/6/2010	1:30:18 PM	Run finished at 1:30 PM
7/6/2010	1:30:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2010	1:42:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/6/2010	1:42:01 PM	Recipe started at 1:42 PM
7/6/2010	1:42:01 PM	H2 valve closed
7/6/2010	1:42:01 PM	BCl3 valve closed
7/6/2010	1:42:01 PM	PH3 valve closed
7/6/2010	1:42:01 PM	SiCl4 pre valve closed
7/6/2010	1:42:01 PM	SiCl4 post valve closed
7/6/2010	1:42:01 PM	Main Vac valve closed
7/6/2010	1:42:01 PM	Bypass valve closed
7/6/2010	1:42:01 PM	Bubbler valve closed
7/6/2010	1:42:01 PM	Helium valve opened
7/6/2010	1:42:01 PM	Helium MFC set to  500.000000
7/6/2010	1:42:01 PM	H2 MFC set to  0.000000
7/6/2010	1:42:01 PM	BCl3 MFC set to  0.000000
7/6/2010	1:42:01 PM	PHl3 MFC set to  0.000000
7/6/2010	1:42:01 PM	SiCl4 MFC set to  0.000000
7/6/2010	1:42:01 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	1:42:01 PM	Tube furnace set to 0
7/6/2010	1:43:18 PM	Helium valve closed
7/6/2010	1:43:18 PM	H2 valve closed
7/6/2010	1:43:18 PM	BCl3 valve closed
7/6/2010	1:43:18 PM	PH3 valve closed
7/6/2010	1:43:18 PM	SiCl4 pre valve closed
7/6/2010	1:43:18 PM	SiCl4 post valve closed
7/6/2010	1:43:18 PM	Main Vac valve closed
7/6/2010	1:43:18 PM	Bypass valve closed
7/6/2010	1:43:18 PM	Bubbler valve closed
7/6/2010	1:43:18 PM	Helium MFC set to  0.000000
7/6/2010	1:43:18 PM	H2 MFC set to  0.000000
7/6/2010	1:43:18 PM	BCl3 MFC set to  0.000000
7/6/2010	1:43:18 PM	PHl3 MFC set to  0.000000
7/6/2010	1:43:18 PM	SiCl4 MFC set to  0.000000
7/6/2010	1:43:18 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	1:43:19 PM	Tube furnace set to 0
7/6/2010	1:43:19 PM	Run finished at 1:43 PM
7/6/2010	1:43:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/6/2010	1:47:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2010	1:47:00 PM	Recipe started at 1:47 PM
7/6/2010	1:47:00 PM	Helium valve closed
7/6/2010	1:47:00 PM	H2 valve closed
7/6/2010	1:47:00 PM	BCl3 valve closed
7/6/2010	1:47:00 PM	PH3 valve closed
7/6/2010	1:47:00 PM	SiCl4 pre valve closed
7/6/2010	1:47:00 PM	SiCl4 post valve closed
7/6/2010	1:47:00 PM	Main Vac valve closed
7/6/2010	1:47:00 PM	Bubbler valve closed
7/6/2010	1:47:00 PM	Bypass valve opened
7/6/2010	1:47:00 PM	Helium MFC set to  0.000000
7/6/2010	1:47:00 PM	H2 MFC set to  0.000000
7/6/2010	1:47:00 PM	BCl3 MFC set to  0.000000
7/6/2010	1:47:00 PM	PHl3 MFC set to  0.000000
7/6/2010	1:47:00 PM	SiCl4 MFC set to  0.000000
7/6/2010	1:47:00 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	1:47:01 PM	Tube furnace set to 0
7/6/2010	1:47:48 PM	Helium valve closed
7/6/2010	1:47:48 PM	H2 valve closed
7/6/2010	1:47:48 PM	BCl3 valve closed
7/6/2010	1:47:48 PM	PH3 valve closed
7/6/2010	1:47:48 PM	SiCl4 pre valve closed
7/6/2010	1:47:48 PM	SiCl4 post valve closed
7/6/2010	1:47:48 PM	Bubbler valve closed
7/6/2010	1:47:48 PM	Main Vac valve opened
7/6/2010	1:47:48 PM	Bypass valve opened
7/6/2010	1:47:48 PM	Helium MFC set to  0.000000
7/6/2010	1:47:48 PM	H2 MFC set to  0.000000
7/6/2010	1:47:48 PM	BCl3 MFC set to  0.000000
7/6/2010	1:47:48 PM	PHl3 MFC set to  0.000000
7/6/2010	1:47:48 PM	SiCl4 MFC set to  0.000000
7/6/2010	1:47:48 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	1:47:48 PM	Tube furnace set to 0
7/6/2010	1:47:48 PM	Run finished at 1:47 PM
7/6/2010	1:47:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2010	1:48:48 PM	Tube furnace set to 100
7/6/2010	1:49:12 PM	Helium valve opened
7/6/2010	1:49:15 PM	Helium MFC set to  100.000000
7/6/2010	2:01:31 PM	Helium valve closed
7/6/2010	2:01:34 PM	Helium MFC set to  0.000000
7/6/2010	2:07:59 PM	Helium valve opened
7/6/2010	2:08:04 PM	Helium MFC set to  100.000000
7/6/2010	2:16:48 PM	Helium MFC set to  0.000000
7/6/2010	2:16:50 PM	Helium valve closed
7/6/2010	2:17:58 PM	Bypass valve closed
7/6/2010	2:17:58 PM	Main Vac valve closed
7/6/2010	2:18:02 PM	Main Vac valve opened
7/6/2010	2:18:03 PM	Bypass valve opened
7/6/2010	2:18:15 PM	Tube furnace set to 0
7/6/2010	2:19:06 PM	Recipe started at 2:19 PM
7/6/2010	2:19:06 PM	Helium valve closed
7/6/2010	2:19:06 PM	BCl3 valve closed
7/6/2010	2:19:06 PM	PH3 valve closed
7/6/2010	2:19:06 PM	SiCl4 pre valve closed
7/6/2010	2:19:06 PM	SiCl4 post valve closed
7/6/2010	2:19:06 PM	Main Vac valve closed
7/6/2010	2:19:06 PM	Bypass valve closed
7/6/2010	2:19:06 PM	Bubbler valve closed
7/6/2010	2:19:06 PM	H2 valve opened
7/6/2010	2:19:06 PM	Helium MFC set to  0.000000
7/6/2010	2:19:06 PM	H2 MFC set to  500.000000
7/6/2010	2:19:06 PM	BCl3 MFC set to  0.000000
7/6/2010	2:19:06 PM	PHl3 MFC set to  0.000000
7/6/2010	2:19:06 PM	SiCl4 MFC set to  0.000000
7/6/2010	2:19:06 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	2:19:07 PM	Tube furnace set to 0
7/6/2010	2:20:27 PM	Helium valve closed
7/6/2010	2:20:27 PM	BCl3 valve closed
7/6/2010	2:20:27 PM	PH3 valve closed
7/6/2010	2:20:27 PM	SiCl4 pre valve closed
7/6/2010	2:20:27 PM	SiCl4 post valve closed
7/6/2010	2:20:27 PM	Main Vac valve closed
7/6/2010	2:20:27 PM	Bypass valve closed
7/6/2010	2:20:27 PM	H2 valve opened
7/6/2010	2:20:27 PM	Bubbler valve opened
7/6/2010	2:20:27 PM	Helium MFC set to  0.000000
7/6/2010	2:20:27 PM	H2 MFC set to  500.000000
7/6/2010	2:20:27 PM	BCl3 MFC set to  0.000000
7/6/2010	2:20:27 PM	PHl3 MFC set to  0.000000
7/6/2010	2:20:27 PM	SiCl4 MFC set to  0.000000
7/6/2010	2:20:27 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	2:20:27 PM	Tube furnace set to 1000
7/6/2010	2:40:27 PM	Helium valve closed
7/6/2010	2:40:27 PM	PH3 valve closed
7/6/2010	2:40:27 PM	Main Vac valve closed
7/6/2010	2:40:27 PM	Bypass valve closed
7/6/2010	2:40:27 PM	H2 valve opened
7/6/2010	2:40:27 PM	BCl3 valve opened
7/6/2010	2:40:27 PM	SiCl4 pre valve opened
7/6/2010	2:40:27 PM	SiCl4 post valve opened
7/6/2010	2:40:27 PM	Bubbler valve opened
7/6/2010	2:40:27 PM	Helium MFC set to  0.000000
7/6/2010	2:40:27 PM	H2 MFC set to  500.000000
7/6/2010	2:40:27 PM	BCl3 MFC set to  15.000000
7/6/2010	2:40:27 PM	PHl3 MFC set to  0.000000
7/6/2010	2:40:27 PM	SiCl4 MFC set to  50.000000
7/6/2010	2:40:27 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	2:40:27 PM	Tube furnace set to 1000
7/6/2010	2:50:27 PM	H2 valve closed
7/6/2010	2:50:27 PM	BCl3 valve closed
7/6/2010	2:50:27 PM	PH3 valve closed
7/6/2010	2:50:27 PM	SiCl4 pre valve closed
7/6/2010	2:50:27 PM	SiCl4 post valve closed
7/6/2010	2:50:27 PM	Main Vac valve closed
7/6/2010	2:50:27 PM	Bypass valve closed
7/6/2010	2:50:27 PM	Helium valve opened
7/6/2010	2:50:27 PM	Bubbler valve opened
7/6/2010	2:50:27 PM	Helium MFC set to  500.000000
7/6/2010	2:50:27 PM	H2 MFC set to  0.000000
7/6/2010	2:50:27 PM	BCl3 MFC set to  0.000000
7/6/2010	2:50:27 PM	PHl3 MFC set to  0.000000
7/6/2010	2:50:27 PM	SiCl4 MFC set to  0.000000
7/6/2010	2:50:27 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	2:50:27 PM	Tube furnace set to 0
7/6/2010	3:10:27 PM	Helium valve closed
7/6/2010	3:10:27 PM	H2 valve closed
7/6/2010	3:10:27 PM	BCl3 valve closed
7/6/2010	3:10:27 PM	PH3 valve closed
7/6/2010	3:10:27 PM	SiCl4 pre valve closed
7/6/2010	3:10:27 PM	SiCl4 post valve closed
7/6/2010	3:10:27 PM	Main Vac valve closed
7/6/2010	3:10:27 PM	Bypass valve closed
7/6/2010	3:10:27 PM	Bubbler valve closed
7/6/2010	3:10:27 PM	Helium MFC set to  0.000000
7/6/2010	3:10:27 PM	H2 MFC set to  0.000000
7/6/2010	3:10:27 PM	BCl3 MFC set to  0.000000
7/6/2010	3:10:27 PM	PHl3 MFC set to  0.000000
7/6/2010	3:10:27 PM	SiCl4 MFC set to  0.000000
7/6/2010	3:10:27 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	3:10:27 PM	Tube furnace set to 0
7/6/2010	3:10:28 PM	Run finished at 3:10 PM
7/6/2010	3:31:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2010	3:31:41 PM	Recipe started at 3:31 PM
7/6/2010	3:31:41 PM	Helium valve closed
7/6/2010	3:31:41 PM	H2 valve closed
7/6/2010	3:31:41 PM	BCl3 valve closed
7/6/2010	3:31:41 PM	PH3 valve closed
7/6/2010	3:31:41 PM	SiCl4 pre valve closed
7/6/2010	3:31:41 PM	SiCl4 post valve closed
7/6/2010	3:31:41 PM	Main Vac valve closed
7/6/2010	3:31:41 PM	Bubbler valve closed
7/6/2010	3:31:41 PM	Bypass valve opened
7/6/2010	3:31:41 PM	Helium MFC set to  0.000000
7/6/2010	3:31:41 PM	H2 MFC set to  0.000000
7/6/2010	3:31:41 PM	BCl3 MFC set to  0.000000
7/6/2010	3:31:41 PM	PHl3 MFC set to  0.000000
7/6/2010	3:31:41 PM	SiCl4 MFC set to  0.000000
7/6/2010	3:31:41 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	3:31:41 PM	Tube furnace set to 0
7/6/2010	3:32:29 PM	Helium valve closed
7/6/2010	3:32:29 PM	H2 valve closed
7/6/2010	3:32:29 PM	BCl3 valve closed
7/6/2010	3:32:29 PM	PH3 valve closed
7/6/2010	3:32:29 PM	SiCl4 pre valve closed
7/6/2010	3:32:29 PM	SiCl4 post valve closed
7/6/2010	3:32:29 PM	Bubbler valve closed
7/6/2010	3:32:29 PM	Main Vac valve opened
7/6/2010	3:32:29 PM	Bypass valve opened
7/6/2010	3:32:29 PM	Helium MFC set to  0.000000
7/6/2010	3:32:29 PM	H2 MFC set to  0.000000
7/6/2010	3:32:29 PM	BCl3 MFC set to  0.000000
7/6/2010	3:32:29 PM	PHl3 MFC set to  0.000000
7/6/2010	3:32:29 PM	SiCl4 MFC set to  0.000000
7/6/2010	3:32:29 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	3:32:29 PM	Tube furnace set to 0
7/6/2010	3:32:29 PM	Run finished at 3:32 PM
7/6/2010	3:32:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2010	5:20:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/6/2010	5:20:26 PM	Recipe started at 5:20 PM
7/6/2010	5:20:26 PM	H2 valve closed
7/6/2010	5:20:26 PM	BCl3 valve closed
7/6/2010	5:20:26 PM	PH3 valve closed
7/6/2010	5:20:26 PM	SiCl4 pre valve closed
7/6/2010	5:20:26 PM	SiCl4 post valve closed
7/6/2010	5:20:26 PM	Main Vac valve closed
7/6/2010	5:20:26 PM	Bypass valve closed
7/6/2010	5:20:26 PM	Bubbler valve closed
7/6/2010	5:20:26 PM	Helium valve opened
7/6/2010	5:20:26 PM	Helium MFC set to  500.000000
7/6/2010	5:20:26 PM	H2 MFC set to  0.000000
7/6/2010	5:20:26 PM	BCl3 MFC set to  0.000000
7/6/2010	5:20:26 PM	PHl3 MFC set to  0.000000
7/6/2010	5:20:26 PM	SiCl4 MFC set to  0.000000
7/6/2010	5:20:26 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	5:20:26 PM	Tube furnace set to 0
7/6/2010	5:21:44 PM	Helium valve closed
7/6/2010	5:21:44 PM	H2 valve closed
7/6/2010	5:21:44 PM	BCl3 valve closed
7/6/2010	5:21:44 PM	PH3 valve closed
7/6/2010	5:21:44 PM	SiCl4 pre valve closed
7/6/2010	5:21:44 PM	SiCl4 post valve closed
7/6/2010	5:21:44 PM	Main Vac valve closed
7/6/2010	5:21:44 PM	Bypass valve closed
7/6/2010	5:21:44 PM	Bubbler valve closed
7/6/2010	5:21:44 PM	Helium MFC set to  0.000000
7/6/2010	5:21:44 PM	H2 MFC set to  0.000000
7/6/2010	5:21:44 PM	BCl3 MFC set to  0.000000
7/6/2010	5:21:44 PM	PHl3 MFC set to  0.000000
7/6/2010	5:21:44 PM	SiCl4 MFC set to  0.000000
7/6/2010	5:21:44 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	5:21:44 PM	Tube furnace set to 0
7/6/2010	5:21:44 PM	Run finished at 5:21 PM
7/6/2010	5:21:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/6/2010	5:30:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2010	5:30:27 PM	Recipe started at 5:30 PM
7/6/2010	5:30:27 PM	Helium valve closed
7/6/2010	5:30:27 PM	H2 valve closed
7/6/2010	5:30:27 PM	BCl3 valve closed
7/6/2010	5:30:27 PM	PH3 valve closed
7/6/2010	5:30:27 PM	SiCl4 pre valve closed
7/6/2010	5:30:27 PM	SiCl4 post valve closed
7/6/2010	5:30:27 PM	Main Vac valve closed
7/6/2010	5:30:27 PM	Bubbler valve closed
7/6/2010	5:30:27 PM	Bypass valve opened
7/6/2010	5:30:27 PM	Helium MFC set to  0.000000
7/6/2010	5:30:27 PM	H2 MFC set to  0.000000
7/6/2010	5:30:27 PM	BCl3 MFC set to  0.000000
7/6/2010	5:30:27 PM	PHl3 MFC set to  0.000000
7/6/2010	5:30:27 PM	SiCl4 MFC set to  0.000000
7/6/2010	5:30:27 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	5:30:27 PM	Tube furnace set to 0
7/6/2010	5:31:16 PM	Helium valve closed
7/6/2010	5:31:16 PM	H2 valve closed
7/6/2010	5:31:16 PM	BCl3 valve closed
7/6/2010	5:31:16 PM	PH3 valve closed
7/6/2010	5:31:16 PM	SiCl4 pre valve closed
7/6/2010	5:31:16 PM	SiCl4 post valve closed
7/6/2010	5:31:16 PM	Bubbler valve closed
7/6/2010	5:31:16 PM	Main Vac valve opened
7/6/2010	5:31:16 PM	Bypass valve opened
7/6/2010	5:31:16 PM	Helium MFC set to  0.000000
7/6/2010	5:31:16 PM	H2 MFC set to  0.000000
7/6/2010	5:31:16 PM	BCl3 MFC set to  0.000000
7/6/2010	5:31:16 PM	PHl3 MFC set to  0.000000
7/6/2010	5:31:16 PM	SiCl4 MFC set to  0.000000
7/6/2010	5:31:16 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	5:31:16 PM	Tube furnace set to 0
7/6/2010	5:31:16 PM	Run finished at 5:31 PM
7/6/2010	5:31:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2010	6:37:03 PM	Tube furnace set to 100
7/6/2010	6:37:08 PM	Helium MFC set to  100.000000
7/6/2010	6:37:09 PM	Helium valve opened
7/6/2010	6:43:06 PM	Helium valve closed
7/6/2010	6:43:09 PM	Helium MFC set to  0.000000
7/6/2010	6:44:15 PM	Bypass valve closed
7/6/2010	6:44:16 PM	Main Vac valve closed
7/6/2010	6:44:21 PM	Main Vac valve opened
7/6/2010	6:44:22 PM	Bypass valve opened
7/6/2010	6:45:44 PM	Tube furnace set to 0
7/6/2010	6:45:51 PM	Recipe started at 6:45 PM
7/6/2010	6:45:51 PM	Helium valve closed
7/6/2010	6:45:51 PM	BCl3 valve closed
7/6/2010	6:45:51 PM	PH3 valve closed
7/6/2010	6:45:51 PM	SiCl4 pre valve closed
7/6/2010	6:45:51 PM	SiCl4 post valve closed
7/6/2010	6:45:51 PM	Main Vac valve closed
7/6/2010	6:45:51 PM	Bypass valve closed
7/6/2010	6:45:51 PM	Bubbler valve closed
7/6/2010	6:45:51 PM	H2 valve opened
7/6/2010	6:45:51 PM	Helium MFC set to  0.000000
7/6/2010	6:45:51 PM	H2 MFC set to  500.000000
7/6/2010	6:45:51 PM	BCl3 MFC set to  0.000000
7/6/2010	6:45:51 PM	PHl3 MFC set to  0.000000
7/6/2010	6:45:51 PM	SiCl4 MFC set to  0.000000
7/6/2010	6:45:51 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	6:45:51 PM	Tube furnace set to 0
7/6/2010	6:47:11 PM	Helium valve closed
7/6/2010	6:47:11 PM	BCl3 valve closed
7/6/2010	6:47:11 PM	PH3 valve closed
7/6/2010	6:47:11 PM	SiCl4 pre valve closed
7/6/2010	6:47:11 PM	SiCl4 post valve closed
7/6/2010	6:47:11 PM	Main Vac valve closed
7/6/2010	6:47:11 PM	Bypass valve closed
7/6/2010	6:47:11 PM	H2 valve opened
7/6/2010	6:47:11 PM	Bubbler valve opened
7/6/2010	6:47:11 PM	Helium MFC set to  0.000000
7/6/2010	6:47:11 PM	H2 MFC set to  500.000000
7/6/2010	6:47:12 PM	BCl3 MFC set to  0.000000
7/6/2010	6:47:12 PM	PHl3 MFC set to  0.000000
7/6/2010	6:47:12 PM	SiCl4 MFC set to  0.000000
7/6/2010	6:47:12 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	6:47:12 PM	Tube furnace set to 1000
7/6/2010	6:55:55 PM	Helium valve closed
7/6/2010	6:55:55 PM	PH3 valve closed
7/6/2010	6:55:55 PM	Main Vac valve closed
7/6/2010	6:55:55 PM	Bypass valve closed
7/6/2010	6:55:55 PM	H2 valve opened
7/6/2010	6:55:55 PM	BCl3 valve opened
7/6/2010	6:55:55 PM	SiCl4 pre valve opened
7/6/2010	6:55:55 PM	SiCl4 post valve opened
7/6/2010	6:55:55 PM	Bubbler valve opened
7/6/2010	6:55:55 PM	Helium MFC set to  0.000000
7/6/2010	6:55:55 PM	H2 MFC set to  500.000000
7/6/2010	6:55:55 PM	BCl3 MFC set to  15.000000
7/6/2010	6:55:55 PM	PHl3 MFC set to  0.000000
7/6/2010	6:55:55 PM	SiCl4 MFC set to  50.000000
7/6/2010	6:55:55 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	6:55:55 PM	Tube furnace set to 1000
7/6/2010	6:59:16 PM	Helium valve closed
7/6/2010	6:59:16 PM	PH3 valve closed
7/6/2010	6:59:16 PM	Main Vac valve closed
7/6/2010	6:59:16 PM	Bypass valve closed
7/6/2010	6:59:16 PM	H2 valve opened
7/6/2010	6:59:16 PM	BCl3 valve opened
7/6/2010	6:59:16 PM	SiCl4 pre valve opened
7/6/2010	6:59:16 PM	SiCl4 post valve opened
7/6/2010	6:59:16 PM	Bubbler valve opened
7/6/2010	6:59:16 PM	Helium MFC set to  0.000000
7/6/2010	6:59:16 PM	H2 MFC set to  500.000000
7/6/2010	6:59:16 PM	BCl3 MFC set to  15.000000
7/6/2010	6:59:16 PM	PHl3 MFC set to  0.000000
7/6/2010	6:59:16 PM	SiCl4 MFC set to  50.000000
7/6/2010	6:59:16 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	6:59:17 PM	Tube furnace set to 1000
7/6/2010	7:04:17 PM	H2 valve closed
7/6/2010	7:04:17 PM	BCl3 valve closed
7/6/2010	7:04:17 PM	PH3 valve closed
7/6/2010	7:04:17 PM	SiCl4 pre valve closed
7/6/2010	7:04:17 PM	SiCl4 post valve closed
7/6/2010	7:04:17 PM	Main Vac valve closed
7/6/2010	7:04:17 PM	Bypass valve closed
7/6/2010	7:04:17 PM	Helium valve opened
7/6/2010	7:04:17 PM	Bubbler valve opened
7/6/2010	7:04:17 PM	Helium MFC set to  500.000000
7/6/2010	7:04:17 PM	H2 MFC set to  0.000000
7/6/2010	7:04:17 PM	BCl3 MFC set to  0.000000
7/6/2010	7:04:17 PM	PHl3 MFC set to  0.000000
7/6/2010	7:04:17 PM	SiCl4 MFC set to  0.000000
7/6/2010	7:04:17 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	7:04:17 PM	Tube furnace set to 0
7/6/2010	7:24:17 PM	Helium valve closed
7/6/2010	7:24:17 PM	H2 valve closed
7/6/2010	7:24:17 PM	BCl3 valve closed
7/6/2010	7:24:17 PM	PH3 valve closed
7/6/2010	7:24:17 PM	SiCl4 pre valve closed
7/6/2010	7:24:17 PM	SiCl4 post valve closed
7/6/2010	7:24:17 PM	Main Vac valve closed
7/6/2010	7:24:17 PM	Bypass valve closed
7/6/2010	7:24:17 PM	Bubbler valve closed
7/6/2010	7:24:17 PM	Helium MFC set to  0.000000
7/6/2010	7:24:17 PM	H2 MFC set to  0.000000
7/6/2010	7:24:17 PM	BCl3 MFC set to  0.000000
7/6/2010	7:24:17 PM	PHl3 MFC set to  0.000000
7/6/2010	7:24:17 PM	SiCl4 MFC set to  0.000000
7/6/2010	7:24:17 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	7:24:17 PM	Tube furnace set to 0
7/6/2010	7:24:17 PM	Run finished at 7:24 PM
7/6/2010	8:14:48 PM	Program exited cleanly
7/6/2010	8:29:21 PM	Program started normally
7/6/2010	8:29:21 PM	Helium valve closed
7/6/2010	8:29:21 PM	H2 valve closed
7/6/2010	8:29:21 PM	BCl3 valve closed
7/6/2010	8:29:22 PM	PH3 valve closed
7/6/2010	8:29:22 PM	SiCl4 pre valve closed
7/6/2010	8:29:22 PM	SiCl4 post valve closed
7/6/2010	8:29:22 PM	Main Vac valve closed
7/6/2010	8:29:22 PM	Bypass valve closed
7/6/2010	8:29:22 PM	Bubbler valve closed
7/6/2010	8:29:22 PM	Helium MFC set to  0.000000
7/6/2010	8:29:22 PM	H2 MFC set to  0.000000
7/6/2010	8:29:22 PM	BCl3 MFC set to  0.000000
7/6/2010	8:29:22 PM	PHl3 MFC set to  0.000000
7/6/2010	8:29:22 PM	SiCl4 MFC set to  0.000000
7/6/2010	8:29:22 PM	Bypass solenoid MFC set to  760.000000
7/6/2010	8:29:24 PM	Tube furnace set to 0
7/6/2010	8:29:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2010	8:29:27 PM	Recipe started at 8:29 PM
7/6/2010	8:29:27 PM	Helium valve closed
7/6/2010	8:29:27 PM	H2 valve closed
7/6/2010	8:29:27 PM	BCl3 valve closed
7/6/2010	8:29:27 PM	PH3 valve closed
7/6/2010	8:29:27 PM	SiCl4 pre valve closed
7/6/2010	8:29:27 PM	SiCl4 post valve closed
7/6/2010	8:29:27 PM	Main Vac valve closed
7/6/2010	8:29:27 PM	Bubbler valve closed
7/6/2010	8:29:27 PM	Bypass valve opened
7/6/2010	8:29:27 PM	Helium MFC set to  0.000000
7/6/2010	8:29:27 PM	H2 MFC set to  0.000000
7/6/2010	8:29:27 PM	BCl3 MFC set to  0.000000
7/6/2010	8:29:27 PM	PHl3 MFC set to  0.000000
7/6/2010	8:29:27 PM	SiCl4 MFC set to  0.000000
7/6/2010	8:29:27 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	8:29:28 PM	Tube furnace set to 0
7/6/2010	8:30:16 PM	Helium valve closed
7/6/2010	8:30:16 PM	H2 valve closed
7/6/2010	8:30:16 PM	BCl3 valve closed
7/6/2010	8:30:16 PM	PH3 valve closed
7/6/2010	8:30:16 PM	SiCl4 pre valve closed
7/6/2010	8:30:16 PM	SiCl4 post valve closed
7/6/2010	8:30:16 PM	Bubbler valve closed
7/6/2010	8:30:16 PM	Main Vac valve opened
7/6/2010	8:30:16 PM	Bypass valve opened
7/6/2010	8:30:16 PM	Helium MFC set to  0.000000
7/6/2010	8:30:16 PM	H2 MFC set to  0.000000
7/6/2010	8:30:16 PM	BCl3 MFC set to  0.000000
7/6/2010	8:30:16 PM	PHl3 MFC set to  0.000000
7/6/2010	8:30:16 PM	SiCl4 MFC set to  0.000000
7/6/2010	8:30:16 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	8:30:17 PM	Tube furnace set to 0
7/6/2010	8:30:17 PM	Run finished at 8:30 PM
7/6/2010	8:30:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2010	8:35:35 PM	Program exited cleanly
7/6/2010	8:38:29 PM	Program started normally
7/6/2010	8:38:29 PM	Helium valve closed
7/6/2010	8:38:29 PM	H2 valve closed
7/6/2010	8:38:29 PM	BCl3 valve closed
7/6/2010	8:38:29 PM	PH3 valve closed
7/6/2010	8:38:29 PM	SiCl4 pre valve closed
7/6/2010	8:38:29 PM	SiCl4 post valve closed
7/6/2010	8:38:29 PM	Main Vac valve closed
7/6/2010	8:38:29 PM	Bypass valve closed
7/6/2010	8:38:29 PM	Bubbler valve closed
7/6/2010	8:38:30 PM	Helium MFC set to  0.000000
7/6/2010	8:38:30 PM	H2 MFC set to  0.000000
7/6/2010	8:38:30 PM	BCl3 MFC set to  0.000000
7/6/2010	8:38:30 PM	PHl3 MFC set to  0.000000
7/6/2010	8:38:30 PM	SiCl4 MFC set to  0.000000
7/6/2010	8:38:30 PM	Bypass solenoid MFC set to  760.000000
7/6/2010	8:38:31 PM	Tube furnace set to 0
7/6/2010	8:38:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/6/2010	8:38:32 PM	Recipe started at 8:38 PM
7/6/2010	8:38:32 PM	Helium valve closed
7/6/2010	8:38:32 PM	H2 valve closed
7/6/2010	8:38:32 PM	BCl3 valve closed
7/6/2010	8:38:32 PM	PH3 valve closed
7/6/2010	8:38:32 PM	SiCl4 pre valve closed
7/6/2010	8:38:32 PM	SiCl4 post valve closed
7/6/2010	8:38:32 PM	Main Vac valve closed
7/6/2010	8:38:32 PM	Bubbler valve closed
7/6/2010	8:38:32 PM	Bypass valve opened
7/6/2010	8:38:32 PM	Helium MFC set to  0.000000
7/6/2010	8:38:32 PM	H2 MFC set to  0.000000
7/6/2010	8:38:32 PM	BCl3 MFC set to  0.000000
7/6/2010	8:38:32 PM	PHl3 MFC set to  0.000000
7/6/2010	8:38:32 PM	SiCl4 MFC set to  0.000000
7/6/2010	8:38:32 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	8:38:32 PM	Tube furnace set to 0
7/6/2010	8:38:32 PM	Helium valve closed
7/6/2010	8:38:32 PM	H2 valve closed
7/6/2010	8:38:32 PM	BCl3 valve closed
7/6/2010	8:38:32 PM	PH3 valve closed
7/6/2010	8:38:32 PM	SiCl4 pre valve closed
7/6/2010	8:38:32 PM	SiCl4 post valve closed
7/6/2010	8:38:32 PM	Bubbler valve closed
7/6/2010	8:38:32 PM	Main Vac valve opened
7/6/2010	8:38:32 PM	Bypass valve opened
7/6/2010	8:38:32 PM	Helium MFC set to  0.000000
7/6/2010	8:38:32 PM	H2 MFC set to  0.000000
7/6/2010	8:38:32 PM	BCl3 MFC set to  0.000000
7/6/2010	8:38:32 PM	PHl3 MFC set to  0.000000
7/6/2010	8:38:32 PM	SiCl4 MFC set to  0.000000
7/6/2010	8:38:32 PM	Bypass solenoid MFC set to  0.000000
7/6/2010	8:38:32 PM	Tube furnace set to 0
7/6/2010	8:38:33 PM	Run finished at 8:38 PM
7/6/2010	8:38:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
